悬臂描述

Lever

1

2

3

4

Spring k (N/m)

2 (0.5 - 4.4)

-

-

-

Freq (kHz)

70 (45 - 100)

-

-

-

Length (µm)

240 (230 - 250)

-

-

-

Width (µm)

30 (28 - 32)

-

-

-

Thickness (µm)

2.7 (1.7 - 3.7)

-

-

-

Shape

rectangular

-

-

-

Material

Silicon

-

-

-

Reflex Coating (nm)

Co/Cr (50)

-

-

-

针尖描述

Tip radius (nm)

47 +/- 7

Tip height (µm)

14 +/- 4

Front angle (°)

0 +/- 1

Back angle (°)

35 +/- 1

Side angle (°)

15 +/- 1

Tip shape

3-sided

Tip material

Silicon

Tip coating (nm)

Co/Cr (50)